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Motorized Microscope Inspection Systems

Products Catalog» Motorized Microscope Inspection

 






Motorized microscope inspection for wafers NIR, brightfield, darkfield system with simultaneous topside bottomside and thru-wafer inspection

GENERAL FEATURES:

• Configurable motorized microscope inspection
- X, Y, Z, theta motorized motion
- X/Y stage travel up to 12"x12"

• Illumination options
- TOP,BOTTOM,transmitted simultaneous illumination
- Brightfield, darkfield, Infrared, UV, DIC, Phase

• Illumination techniques options
- LED brightfield/darkfield
- NIR LED or NIR halogen illuminators
- Transmitted coaxial VIS/IR
- Reflected coaxial VIS/NIR/UV/Darkfield

• Programmable X/Y motion control
- Menu driven or joystick control
- 39nm step resolution X and Y
- Auto-step, manual step, pattern, wafer map
- User defined recipes for operators
- Joystick X/Y/theta, Z-motion via thumbwheel
- Mapped data by location, binning, category, operator

• Viewing options:
- Single/dual monitor viewing
- Direct to monitor high definition
- PC interfaced camera(s): resolutions to 32MP

• CLEAN ROOM compatible materials and surfaces

• OPTICS options:
- Macro, micro, microzoom, long working distance
- Motorized / manual microscope objectives
- Microzoom optics to 12:1 zoom ratio

• Ergonomic user designed features
- Inker control available
- Optional motorized table height adjustment

• Customizable to meet your requirements
- Semiconductor: die inspection, whole wafer, die frame
- Biomed: gel tray, gel-pak, whole slide

• Built to last - only top quality components used
- High reliability in production use
- Ball leadscrew design for accuracy and durability

• Proudly MADE in USA

Precision Motorized Microscope Inspection Systems:

Oem-Optical offers a wide range of motorized inspection systems for semiconductor and biomedical companies. The systems are fully configurable for many industries with precision 39nm resolution motion control. Stage motion for X, Y, Z, theta are via customizable computer control recipes and joystick.

We offer many illumination options: Visible/NIR transmitted and reflected (ideal for MEMS inspection), co-axial brightfield and darkfield topside and bottomside (wafer alignment inspection),UV, DIC phase contrast. Our lighting is comprised of our high output custom LED and halogen for visible, UV, NIR illumination.

Our motorized inspection systems are available with adjustable height table surfaces with radiused front edges for operator comfort and efficiency. The motorized motion is quiet and smooth, allowing operators to find the correct working position to eliminate fatigue.

All systems are designed and built in the USA using only the finest materials and USA sourced components for a proven high reliability record.

We offer many optional systems and accessories to complete the package, from LED custom lighting to microscope and optical systems for inspection, rework, and microassembly tasks. We can also custom build stations to fit your needs.

Contact us with your requirements


MODELS:
 


motorized-wafer-die-microscope-inspection.png Motorized wafer microscope inspection


Semiconductor die inspection: Topside and Bottom illumination, NIR thru-wafer
- Stage travel to 12" x 12"
- Motorized X, Y, Z, theta, 39nm resolution
- LED white light top and bottom illumination
- Simultaneous topside/bottomside inspection option
- Many inspection techniques available:
- Transmitted/reflected light
- Brightfield, darkfield, DIC
- Near-InfraRed (NIR) thru-wafer inspection
- Inker control available
- Choice of microzoom or motorized nosepiece optics
- Ideal for MEMS, pressure sensor, die inspection
- We build to your requirements
- Huge cost savings over existing vendors systems
COST $ call




 

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