Motorized Microscope Inspection Systems

• Configurable motorized microscope inspection
- X, Y, Z, theta motorized motion
- X/Y stage travel up to 12"x12"

• Illumination options
- TOP,BOTTOM,transmitted simultaneous illumination
- Brightfield, darkfield, Infrared, UV, DIC, Phase

• Illumination techniques options
- LED brightfield/darkfield
- NIR LED or NIR halogen illuminators
- Transmitted coaxial VIS/IR
- Reflected coaxial VIS/NIR/UV/Darkfield

• Programmable X/Y motion control
- Menu driven or joystick control
- 39nm step resolution X and Y
- Auto-step, manual step, pattern, wafer map
- User defined recipes for operators
- Joystick X/Y/theta, Z-motion via thumbwheel
- Mapped data by location, binning, category, operator

• Viewing options:
- Single/dual monitor viewing
- Direct to monitor high definition
- PC interfaced camera(s): resolutions to 32MP

• CLEAN ROOM compatible materials and surfaces

• OPTICS options:
- Macro, micro, microzoom, long working distance
- Motorized / manual microscope objectives
- Microzoom optics to 12:1 zoom ratio

• Ergonomic user designed features
- Inker control available
- Optional motorized table height adjustment

• Customizable to meet your requirements
- Semiconductor: die inspection, whole wafer, die frame
- Biomed: gel tray, gel-pak, whole slide

• Built to last - only top quality components used
- High reliability in production use
- Ball leadscrew design for accuracy and durability

• Proudly MADE in USA